The multifunctional integrated measurement attachment is used for analyzing films on boards, blocks, and substrates, and can perform tests such as crystal phase detection, orientation, texture, stress, and in-plane structure of thin films.

Functional characteristics of multifunctional integrated measurement accessories：

Perform polar diagram testing using transmission or reflection methods;

Stress testing can be conducted using either the parallel tilt method or the same tilt method;

Thin film testing (in-plane rotation of samples)

Application areas of multifunctional integrated measurement accessories：

Evaluation of metal assembly structures such as rolled plates;

Evaluation of ceramic orientation;

Evaluation of crystal priority orientation in thin film samples;

Residual stress testing of various metal and ceramic materials (evaluation of wear resistance, cutting resistance, etc.);

Residual stress testing of multilayer films (evaluation of film peeling, etc.);

Analysis of surface oxidation and nitride films on high-temperature superconducting materials such as thin films and metal plates;

Glass Si、 Analysis of multilayer films on metal substrates (magnetic thin films, metal surface hardening films, etc.);

Analysis of electroplating materials such as macromolecular materials, paper, and lenses.

Technical specifications for multifunctional integrated measurement accessories：

Alpha axis (tilt) minimum step distance: 0.001 °/step, dynamic range:- 45°-90°      

Minimum step pitch of β axis (rotation): 0.001 °/step, dynamic range: 0 ° -360 °

Minimum step distance on the z-axis: 0.001 °/step, dynamic range: 0-10mm

Sample size: maximum diameter of 100mm, adjustable thickness